@article{84,
  author = {Patricia Nieva and Haruna Tada and Paul Zavracky and George Adams and Ioannis Miaoulis and Peter Wong},
  title = {Mechanical and thermophysical properties of silicon nitride thin films at high temperatures using in-situ MEMS temperature sensors},
  year = {1998},
  journal = {MRS Online Proceedings Library (OPL)},
  volume = {546},
  publisher = {Cambridge University Press},
}