Godin, J. R., Seong-hoon, W. ., Nieva, P. M., Phong, L. N., & Pope, T. . Residual Stress Dependency on Wafer Location of Thin Film PECVD Silicon Nitride. N/A.
Publications
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Tada, H. ., Abramson, A. ., Nieva, P. ., Zavracky, P. ., Miaoulis, I. ., & Wong, P. . (1998). MEMS as Temperature Sensors During High Temperature Processing. MRS Online Proceedings Library Archive, 518.
Abramson, A. ., Tadal, H. ., Nieva, P. ., Zavracky, P. ., Miaoulis, I. ., & Wong, P. . (1998). Partial Transparency Effects of Silicon During Rapid Thermal Processing. MRS Online Proceedings Library (OPL), 525.
Tada, H. ., Nieva, P. ., Zavracky, P. ., Miaoulis, I. ., & Wong, P. . (1998). Determining the high-temperature properties of thin films using bilayered cantilevers. MRS Online Proceedings Library (OPL), 546.
Tada, H. ., Abramson, A. R., Miaoulis, I. N., Wong, P. Y., Nieva, P. ., & Zavracky, P. . (1998). Effects of surface patterning in thin film structures on the thermal radiative properties during rapid thermal processing. ASME HEAT TRANSFER DIV PUBL HTD, 361, 93-98.
Nieva, P. ., Tada, H. ., Zavracky, P. ., Adams, G. ., Miaoulis, I. ., & Wong, P. . (1998). Mechanical and thermophysical properties of silicon nitride thin films at high temperatures using in-situ MEMS temperature sensors. MRS Online Proceedings Library (OPL), 546.
Abramson, A. ., Nieva, P. ., Tada, H. ., Zavracky, P. ., Miaoulis, I. ., & Wong, P. . (1999). Effect of doping level during rapid thermal processing of multilayer structures. Journal of Materials Research, 14, 2402-2410.
Bargmann, M. ., Kumpel, A. ., Tada, H. ., Nieva, P. ., Zavracky, P. ., Miaoulis, I. N., & Wong, P. Y. (1999). Temperature-dependent coefficient of thermal expansion of silicon nitride films used in microelectromechanical systems. MRS Online Proceedings Library, 605, 235-240.
Tada, H. ., Kumpel, A. E., Lathrop, R. E., Slanina, J. B., Nieva, P. ., Zavracky, P. ., Miaoulis, I. N., & Wong, P. Y. (2000). Novel imaging system for measuring microscale curvatures at high temperatures. Review of Scientific Instruments, 71, 161-167.
Tada, H. ., Kumpel, A. E., Lathrop, R. E., Slanina, J. B., Nieva, P. ., Zavracky, P. ., Miaoulis, I. N., & Wong, P. Y. (2000). STRUCTURAL, MECHANICAL, THERMODYNAMIC, AND OPTICAL PROPERTIES OF CONDENSED MATTER (PACS 61-68, 78)-Thermal expansion coefficient of polycrystalline silicon and silicon dioxide thin films at high. Journal of Applied Physics, 87, 4189-4193.
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