@inproceedings{194,
  author = {Hélène Debéda and U-Chan Chung-Seu and Armaghan Salehian and Catherine Elissalde},
  title = {From bonded to free-standing piezoelectric layers for MEMS applications: adaptation of the screen-printed process for properties improvement},
  year = {2022},
  journal = {IWPMA2022 (Workshop on Piezoelectric Materials and Applications in Actuators)},
}