@article{71,
  author = {Soonam Park and Soo Jeon and Toan Tran and Jang-Gyoo Yang and Qiwei Liang and Dmitry Lubomirsky},
  title = {Remote plasma source seasoning},
  year = {2011},
  journal = {Patent},
  edition = {United States of America},
  chapter = {US7989365B2},
  note = {US Patent 7,989,365},
}