Fast and scalable thin film deposition, doping and surface engineering using Atmospheric Pressure Spatial ALD (AP-SALD): application to new generation PV

TitleFast and scalable thin film deposition, doping and surface engineering using Atmospheric Pressure Spatial ALD (AP-SALD): application to new generation PV
Publication TypeConference Paper
Year of Publication2015
AuthorsMunoz-Rojas, D., CL. Armstrong, AT. Marin, RLZ. Hoye, KP. Musselman, and JL. MacManus-Driscoll
Conference Name1st RAFALD workshop