Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2
| Title | Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2 |
|---|---|
| Author | |
| Year of Publication |
2018
|
| Journal |
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
|
| Volume |
36
|
| Number of Pages |
031602
|
| Download citation |