In-situ observation of nucleation and property evolution in films grown with an atmospheric pressure spatial atomic layer deposition system
| Title | In-situ observation of nucleation and property evolution in films grown with an atmospheric pressure spatial atomic layer deposition system |
|---|---|
| Author | |
| Year of Publication |
2020
|
| Journal |
Nano Express
|
| Volume |
1
|
| Number of Pages |
010045
|
| Download citation |