Maas, A., Mistry, K., Sleziona, S., Alshehri, A. H., Asgarimoghaddam, H., Musselman, K. P., & Schleberger, M. (2024). Growth of p-doped 2D-Mo S 2 on A l 2 O 3 from spatial atomic layer deposition Journal of Vacuum Science & Technology A, 42(2).