Master of Applied Science (MASc) in Mechanical and Mechatronics Engineering - Nanotechnology

The program information below is valid for the fall 2023 term (September 1, 2023 - December 31, 2023).

The Graduate Studies Academic Calendar is updated 3 times per year, at the start of each academic term (January 1, May 1, September 1). Graduate Studies Academic Calendars from previous terms can be found in the archives.

  • Admit term(s) 
    • Fall
    • Winter
    • Spring
  • Delivery mode 
    • On-campus
  • Program type 
    • Collaborative
    • Master's
    • Research
  • Registration option(s) 
    • Full-time
  • Study option(s) 
  • Minimum requirements 
    • The Department of Mechanical and Mechatronics Engineering requires either (i) a 75% overall standing in the last two years, or equivalent, in a relevant four-year Honours Bachelor's degree or equivalent or (ii) a 75% overall standing or equivalent, in a relevant four-year Honours Bachelor's degree or equivalent, as the minimum requirement for admission to a Master's program for applicants educated at a Canadian institution. A 75% overall standing or equivalent, in a relevant four-year Honours Bachelor's degree or equivalent is the minimum requirement for admission to a Master's program for applicants educated outside of Canada.
  • Application materials 
    • Résumé
    • Supplementary information form
    • Transcript(s)
  • References 
    • Number of references:  2
    • Type of references: 


  • English language proficiency (ELP) (if applicable)

    Thesis option:

    The MASc program emphasizes high level independent research by candidates. The topic of the thesis and the choice of courses are decided by the student and their supervisor(s). Each student's program is subject to the approval of the Associate Chair for Graduate Studies. Candidates will participate in a research program generally involving either theory or experimentation, or both.

  • Graduate Academic Integrity Module (Graduate AIM)
  • Courses 
    • Students must complete 4 one-term (0.50 unit weight) graduate level courses (or courses acceptable for graduate credit), including NANO 600 Introduction to Nanotechnology and 1 nanotechnology core course. A maximum of 1 500-level course may be counted for credit.
    • Nanotechnology core courses:
      • NANO 601 Characterization of Nanomaterials
      • NANO 602 Structure and Spectroscopy of Nanoscale Materials
      • NANO 603 Nanocomposites
      • NANO 604 Nanomechanics and Molecular Dynamics Simulations
      • NANO 605/SYDE 683 Design of MEMS & NEMS
      • NANO 606/SYDE 682 Advanced MicroElectroMechanical Systems: Physics, Design & Fabrication
    • Core courses are designed to provide the base knowledge and skill set required to prepare students for more specialized courses and to conduct interdisciplinary nanoscale research.
    • Students who have completed their Bachelor of Applied Science (BASc) degree in Nanotechnology Engineering at the University of Waterloo can not take NANO 600. Instead, they can choose 1 course from the list of nanotechnology core courses.
    • Additional Faculty regulations concerning Master's degree requirements are:
      • At least two-thirds of the courses used for credit in a candidate's program must be taken from the 600 and 700 series.
      • No more than half of the courses used for credit may be taught by the candidate's supervisor.
      • The candidate must obtain a pass in all courses credited to their program, with a minimum overall average of 70% (a grade of less than 65% in any course counts as a failure).
      • At least half of the courses used for credit must normally be Faculty of Engineering courses.
  • Link(s) to courses
  • Graduate Safety Milestone
    • The Graduate Safety Milestone must be completed by the end of the student's second registered term.
  • Seminar Attendance
    • Students must attend at least 8 Mechanical and Mechatronics Engineering research seminars.
  • Nanotechnology Seminar
    • This seminar is a forum for student presentation of research results or proposals. Invited speakers from academia and industry will also present results of research from time to time. The range of topics that will be addressed in the seminar crosses all areas of research in the collaborative program. Each student is required to present at least 1 research seminar. To receive credit, students are expected to attend at least 8 seminars other than their own before completing their program.
    • The Nanotechnology Seminar may simultaneously count towards the Seminar Attendance requirement of the Mechanical and Mechatronics Engineering Department.
  • Master’s Thesis
    • Candidates are requested to give advance notice of their intention to submit a thesis approximately three months prior to submission.
    • Students must orally defend a thesis a thesis embodying the results of independent research work to the satisfaction of an Examining Committee. The composition of the Examining Committee must be consistent with the committee composition outlined in the Faculty of Engineering minimum requirements section of the Graduate Studies Academic Calendar. The topic of the thesis is arranged by the supervisor(s) and the student.