Giga-to-nanoelectronics laboratory

The Giga‑to‑Nanoelectronics (G2N) Centre is a $24M multidisciplinary research facility established in 2005 to advance nano‑scale and thin‑film electronic materials and devices. Combining world‑class fabrication, characterization, and materials synthesis capabilities, G2N enables interdisciplinary research in large‑area electronics and electronics on unconventional substrates. Open to university and external users, the Centre emphasizes hands‑on training and independent equipment use, supporting education, innovation, and impactful solutions to complex engineering challenges in Canada and beyond.

Website banner for the Giga-to-Nanoelectronics Centre

List of equipment

The following list is the equipment housed within the G2N and its location in the Engineering 3 building. 38 tools provide researchers the capability to perform thin-film deposition of metals, semiconductors and dielectric layers. More recently, the lab has expanded into two-dimensional layers for scaling of CMOS technology into next-generation devices. In addition, the lab contains photolithography and etching tools used to define and pattern layers and structures on a wafer surface. The lab also contains characterization tools to study the mechanical, structural, optical and electrical characteristics of materials and devices. The lab facilitates the microfabrication of organic and inorganic semiconductor materials for applications in thin-film transistors, organic light-emitting diodes, organic photovoltaic devices and large-scale integrated circuits.

Example of lithography equipment
Equipment Room number
UV/IR 
Spectrometer
E3 3146
FTIR 
Spectrometer
E3 3146
 
Raman 
Spectrometer
E3 3146
 
SU5000 SEM E3 1120
Keithley Probe Station E3 1120
Sheet Resistance E3 1120
Dektak E3 1120
Filmetrics Spectrometer E3 1120
Dicing Saw E3 1129
AJA Sputtering E3 1120
Film Stress Gauge E3 1120
Vacuum Oven E3 1120
General Oven  E3 1120
Lithography MA6  E3 1137
Mask Aligner MJB3 E3 1137
Intlvac Glove Box E3 1136
Intlvac Thermal Evaporator E3 1136
Intlvac E-beam Evaporator E3 1136
EvoVac Evaporator E3 1136
Equipment Room number
RIE Metal E3 1131
RIE Oxide E3 3136
RIE Polymer E3 3136
Kurt J. Lesker Se Evaporator E3 1133
Intlvac Se Evaporator E3 1133
Parylene Coater E3 3139
WL01 Cluster  E3 1136
WL02 Cluster  E3 1131
WLOS Sputter E3 1131
Edwards Sputtering E3 1131
Spin coater E3 1137A
Wetbenches E3 117 & 1137A
Vigor Glove Box E3 3145
Angstrom G/B Evaporator E31145
Optical microscope E3 1137
CVD/ALD cluster E3 1131
Au coater E3 3139
AFM E3 3139
XRD XRD

Facility management

William S. Wong

Professor/Director

Email: wswong@uwaterloo.ca

Phone: 519-888-4567, ext., 31121

Website

For more complete information, visit the core facility website: Giga-to-Nanoelectronics Centre