Siva Sivoththaman

Professor, Electrical and Computer Engineering
Contact Information
Groups
Powertrain and Emissions, Fuel cells, N to S profiles
Links
Link to profile: Siva Sivoththaman
Additional Information

Research Expertise

  • Advanced processing technologies for microelectronic devices and process modeling
  • Low-permittivity dielectric films and device integration
  • Low-thermal budget, rapid thermal, and optothermal processing in silicon
  • Micro-electro-mechanical systems (MEMS) technology, silicon micromachining
  • Nanocrystalline semiconductors and nanostructures
  • Silicon-based crystalline and thin-film photovoltaic devices: design and fabrication technology

Centre for Advanced Photovoltaic Devices and Systems

Personal Website