Optimization and control of a thin film growth process: A hybrid first principles/artificial neural network based multiscale modelling approach
Title | Optimization and control of a thin film growth process: A hybrid first principles/artificial neural network based multiscale modelling approach |
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Author | |
Year of Publication |
2018
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Journal |
Computers & Chemical Engineering
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Volume |
119
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Start Page |
465
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Date Published |
11/2018
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URL |
https://www.sciencedirect.com/science/article/pii/S0098135418306379
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