Optimization and control of a thin film growth process: A hybrid first principles/artificial neural network based multiscale modelling approach

Title Optimization and control of a thin film growth process: A hybrid first principles/artificial neural network based multiscale modelling approach
Author
Year of Publication
2018
Journal
Computers & Chemical Engineering
Volume
119
Start Page
465
Date Published
11/2018
URL
https://www.sciencedirect.com/science/article/pii/S0098135418306379
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