Yeow, T. W.-K., Mistry, K. ., Shahin, A. ., Yavuz, M. ., & Musselman, K. P. (2020). Atmospheric-pressure spatial chemical vapor deposition of tungsten oxide. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 38, 052411.
Reference author: Travis Yeow
First name
Travis
Middle name
Wen-Kai
Last name
Yeow
Mistry, K. ., Jones, A. ., Kao, M. ., Yeow, T. W.-K., Yavuz, M. ., & Musselman, K. P. (2020). In-situ observation of nucleation and property evolution in films grown with an atmospheric pressure spatial atomic layer deposition system. Nano Express, 1, 010045.