Atmospheric-pressure spatial chemical vapor deposition of tungsten oxide
| Title | Atmospheric-pressure spatial chemical vapor deposition of tungsten oxide |
|---|---|
| Author | |
| Year of Publication |
2020
|
| Journal |
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
|
| Volume |
38
|
| Number of Pages |
052411
|
| Download citation |