Yeow, T. W.-K., Mistry, K., Shahin, A., Yavuz, M., & Musselman, K. P. (2020). Atmospheric-pressure spatial chemical vapor deposition of tungsten oxide Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 38, 052411.
Reference author: Travis Yeow
First name
Travis
Middle name
Wen-Kai
Last name
Yeow
Mistry, K., Jones, A., Kao, M., Yeow, T. W.-K., Yavuz, M., & Musselman, K. P. (2020). In-situ observation of nucleation and property evolution in films grown with an atmospheric pressure spatial atomic layer deposition system Nano Express, 1, 010045.