Atmospheric atomic layer deposition of SnO 2 thin films with tin (ii) acetylacetonate and water
| Title | Atmospheric atomic layer deposition of SnO 2 thin films with tin (ii) acetylacetonate and water |
|---|---|
| Author | |
| Year of Publication |
2022
|
| Journal |
Dalton Transactions
|
| Volume |
51
|
| Start Page |
9278
|
| Issue |
24
|
| Download citation |