Highly sensitive self-actuated zinc oxide resonant microcantilever humidity sensor
| Title | Highly sensitive self-actuated zinc oxide resonant microcantilever humidity sensor |
|---|---|
| Author | |
| Year of Publication |
2022
|
| Journal |
Nano letters
|
| Volume |
22
|
| Start Page |
3196
|
| Issue |
8
|
| Download citation |