Tze Wei Yeow

Tze Wei Yeow

Contact information

Phone: 519-888-4567 x32152
Location: E3 3159


Tze Yeow

Biography summary

John Yeow is a Professor in the Department of Systems Design Engineering and is cross-appointed to Mechanical and Mechatronics Engineering and Electrical and Computer Engineering at the University of Waterloo. He is also the Director of the Advanced Micro & Nanodevice Lab at the university and holds the Canada Research Chair in Micro and Nanodevices.

Professor Yeow’s research expertise lies in Micro-/Nano- Electro Mechanical systems. He aims to develop mechanical machines that are integrated with microelectronics at the micron scale. New device concepts include, but are not limited to: the integration of micro-optics components, miniature signal processing devices, biomedical/genome processing devices, miniature electromechanical wireless components (filters, mixers, antennas), miniature opto-electromechanical devices (optical cross connect, optical relays, optical multiplexers, deformable optics), miniature biosensors and environmental sensors, and microfluidics devices. Professor Yeow also explores issues such as self-testing, self-assembly, and automated packaging.

He is currently developing nanodevices and highly selective sensors that will help create new medical instruments for diagnosing and treating disease. These include MEMS optical scanner for endoscopic optical coherence tomographic imaging, micromirror devices for genetic microarray reading and tissue imaging, robotics for micromanipulations of MEMS components, carbon nanotube-based sensors for biomedical applications, and lab-on-a-chip designs.

Additionally, Professor Yeow’s company ARTsensing Inc. has commercialized an invention which is a product of his research – the world’s first transparent and flexible radiation detector that measures ionizing radiation delivered to cancer patients during treatment.

In addition to his many accomplishments, Professor Yeow was the recipient of the Young Engineer Award from the Ontario Society of Professional Engineers in 2008.

Research interests

  • Optomechatronic Systems
  • Biomedical Sensors
  • Lab-on-a-chip
  • BioMEMS
  • Microassembly
  • Microelectromechanical Systems
  • Robot Mechantronic Design
  • Microsystem
  • Advanced Manufacturing
  • Nanotechnology
  • Biomedical
  • Gas Sensors
  • Radiation Sensors
  • Radiation Shields
  • X-ray
  • Ultrasound
  • Optical Devices


  • 2003, Doctorate, PhD, University of Toronto
  • 1999, Master's, MASc, University of Toronto
  • 1997, Bachelor's, BASc, University of Toronto


  • BME 364 - Engineering Biomedical Economics
    • Taught in 2021
  • BME 386 - The Physics of Medical Imaging
    • Taught in 2019, 2022, 2023
  • NANO 606 - Advanced MicroElectroMechanical Systems: Physics, Design & Fabrication
    • Taught in 2021, 2022, 2023
  • NANO 702 - Nanotechnology Tools
    • Taught in 2019
  • NE 461 - Micro and Nano-instrumentation
    • Taught in 2022
  • SYDE 682 - Advanced MicroElectroMechanical Systems: Physics, Design & Fabrication
    • Taught in 2019, 2021, 2022, 2023

* Only courses taught in the past 5 years are displayed.

Selected/recent publications

  • Luo, Hua and Sun, Weijie and Yeow, John TW, Modelling and adaptive dynamic sliding mode control of dielectrophoresis-based micromanipulation, Transactions of the Institute of Measurement and Control, 2016
  • Wong, Lawrence LP and Na, Shuai and Chen, Albert I and Li, Zhenhao and Macecek, Mirek and Yeow, John TW, A feasibility study of piezoelectric micromachined ultrasonic transducers fabrication using a multi-user MEMS process, Sensors and Actuators A: Physical, 247, 2016, 430 - 439
  • Yeow, John TW, Effective and Efficient [The Editor's Desk], IEEE Nanotechnology Magazine, 10(2), 2016, 4 - 4
  • Li, Zhenhao and Chen, Siyuan and Nambiar, Shruti and Sun, Yonghai and Zhang, Mingyu and Zheng, Wanping and Yeow, John TW, PMMA/MWCNT nanocomposite for proton radiation shielding applications, Nanotechnology, 27(23), 2016
  • Lu, Limin and Chen, Chen and Samarasekera, Champika and Yeow, John TW, Influence of zeolite shape and particle size on their capacity to adsorb uremic toxin as powders and as fillers in membranes, Journal of Biomedical Materials Research Part B: Applied Biomaterials, 2016

Graduate studies