Uncertainty analysis and robust optimization of multiscale process systems with application to epitaxial thin film growth
Title | Uncertainty analysis and robust optimization of multiscale process systems with application to epitaxial thin film growth |
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Author | |
Year of Publication |
2014
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Journal |
Chemical Engineering Science
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Volume |
116
|
Number of Pages |
590-600
|
DOI |
10.1016/j.ces.2014.05.027
|
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