Worst-case and distributional robustness analysis of a thin film deposition process
| Title | Worst-case and distributional robustness analysis of a thin film deposition process |
|---|---|
| Author | |
| Year of Publication |
2015
|
| Journal |
IFAC-PapersOnLine
|
| Volume |
48
|
| Number of Pages |
1126-1131
|
| DOI |
10.1016/j.ifacol.2015.09.119
|
| Download citation |