Atmospheric Pressure Spatial Atomic Layer Deposition of Silicon Oxide Using DIPAS and Ozone
| Title | Atmospheric Pressure Spatial Atomic Layer Deposition of Silicon Oxide Using DIPAS and Ozone |
|---|---|
| Author | |
| Year of Publication |
2025
|
| Journal |
The Journal of Physical Chemistry C
|
| Volume |
129
|
| Issue |
6
|
| Download citation |