Effect of different oxygen precursors on alumina deposited using a spatial atomic layer deposition system for thin-film encapsulation of perovskite solar cells
| Title | Effect of different oxygen precursors on alumina deposited using a spatial atomic layer deposition system for thin-film encapsulation of perovskite solar cells |
|---|---|
| Author | |
| Year of Publication |
2023
|
| Journal |
Nanotechnology
|
| Volume |
35
|
| Issue |
9
|
| Number of Pages |
095401
|
| Download citation |