Fast and scalable thin film deposition, doping and surface engineering using Atmospheric Pressure Spatial ALD (AP-SALD): application to new generation PV

Title Fast and scalable thin film deposition, doping and surface engineering using Atmospheric Pressure Spatial ALD (AP-SALD): application to new generation PV
Author
D Munoz-Rojas
CL Armstrong
AT Marin
RLZ Hoye
KP Musselman
JL MacManus-Driscoll
Year of Publication
2015
Conference Name
1st RAFALD workshop
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