Nanomanufacturing: high-throughput, cost-effective deposition of atomic scale thin films via atmospheric pressure spatial atomic layer deposition
| Title | Nanomanufacturing: high-throughput, cost-effective deposition of atomic scale thin films via atmospheric pressure spatial atomic layer deposition |
|---|---|
| Author | |
| Year of Publication |
2016
|
| Journal |
Chemistry of Materials
|
| Volume |
28
|
| Number of Pages |
8443-8452
|
| Download citation |