Robust multivariable estimation and control in an epitaxial thin film growth process under uncertainty
| Title | Robust multivariable estimation and control in an epitaxial thin film growth process under uncertainty |
|---|---|
| Author | |
| Year of Publication |
2015
|
| Journal |
Journal of Process Control
|
| Volume |
34
|
| Number of Pages |
70-81
|
| DOI |
10.1016/j.jprocont.2015.07.002
|
| Download citation |