Creep and fatigue failure in single-and double hot arm MEMS thermal actuators
| Title | Creep and fatigue failure in single-and double hot arm MEMS thermal actuators |
|---|---|
| Author | |
| Year of Publication |
2009
|
| Journal |
Journal of failure analysis and prevention
|
| Volume |
9
|
| Number of Pages |
159-170
|
| Download citation |