Facilities

GEN10 in blue

under the Gen10

The Molecular Beam Epitaxy Facility is located in the newly erected Quantum Nano Centre of the University of Waterloo.  The key instrumentation – Veeco GEN10 Molecular Beam Epitaxy system – is built around a cluster tool designed to accommodate three growth reactors.  During the Phase I only one reactor was purchased, equipped for the growth of arsenides and antimonides. The lab space, services and auxiliary apparatus, however, have been designed to support all three reactors. This includes a multi-terminal liquid nitrogen phase separator, 50,000 litres dedicated LN2 tank, 95kVA UPS powered from 120kVA emergency circuit and the state-of-the-art high resolution diffractometer.