From bonded to free-standing piezoelectric layers for MEMS applications: adaptation of the screen-printed process for properties improvement
| Title | From bonded to free-standing piezoelectric layers for MEMS applications: adaptation of the screen-printed process for properties improvement |
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| Author | |
| Year of Publication |
2022
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| Conference Name |
IWPMA2022 (Workshop on Piezoelectric Materials and Applications in Actuators)
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