Specifications 

  • SA-HF3 X-ray generator 3 KW Micro x-ray diffraction machine
  • X-ray tube: 2.2 KW, copper, long-fine focus
  • AFC8-Partial-c, 4-circle goniometer:
    • Axial angle ranges:
      • ω-axis: ±90°
      • 2θ-axis: 0° to 120°
      • χ-axis: -5° to 60°
      • φ: 0° to 360°
    • Collimators:
      • 50 ~ 800 microns pin-hole collimators and 20 micron mono-capillary collimator, which provides analysis in micro area
      • 0.3 mm, 0.5 mm, 0.8 mm (circle)
      • 0.02 mm, 0.05 mm, 0.1 mm, 0.2 mm (square)
  • CCD video (color) microscope: 70x magnification
  • Saturn 70 digital CCD camera system
  • Monochromator optical system with flat graphite monochromator with rock, tilt and translation adjustments

Applications

  • Phase analysis of powers and multi crystal matters
  • Orientation of single crystal ingots or wafer
  • Lattice parameter measurement
  • Surface residual stress