Mode PSI

  • Range: 160 nm
  • Vertical resolution: 0.3 nm (single measurement), 0.1 nm (multiple measurement)

Mode VSI

  • Range: 2 mm
  • Vertical resolution: 3 nm (single measurement), 1 nm (multiple measurement) 

WYKO NT1100 optical profiler



  • An optical profile outputProvides high resolution 3D surface measurement, from sub-nanometer roughness to millimeter-high steps.
  • Ensures sub-nanometer vertical resolution at all magnifications.
  • Provides high resolution measurements over a large field of view.
  • Enables accurate, cost-effective metrology for R&D and production of thick films, optics, ceramics, and advanced materials.