Special Issue "Materials for Nano- and Micro-Electro-Mechanical-Systems"

Saturday, January 20, 2024

MDPI Materials

Dear Colleagues,

The materials selection, design, tuning and functionalization/passivation with these tuned materials are requirements for ultra-precision and possible shortest response and detection time for dynamic and accurate sensing in nano- and micro-system devices.

Moreover, cost reduction, scale-up, compatibility, and simplicity are major value additions and breakthroughs, in addition to high-responsivity, -sensitivity, and -precision.

Furthermore, the integration of nano- and micro-electro-mechanical devices, which are functionalized with emerging materials, to CMOS systems and their electronic packing are very challenging since it requires the multiple deposition of layers of dielectrics and metals, and results in an atomic mismatch that increases ohmic resistance, creating noise and reducing sensitivity, selectivity and responsivity.

This Special Issue aims to introduce materials and device design for “Nano- and Micro-Electro-Mechanical-Systems”. Topics include, but are not limited to, the following:

  • Graphene/graphene-like and TMD materials based field-effect-transistors (FET)-sensors;
  • Nanoplasmonic/ Photo-electro-chemical sensors;
  • Thin -Film-Transistor (TFT)-based flexible sensors;
  • DNA probe-sensors;
  • Terahertz Resonant-Tunneling Diodes for sensing/detection/energy harvesting/wireless applications;
  • Electrical, mechanical and optical testing of nano/micro-devices: sensors, actuators and harvesters;
  • Dynamic electrical characterization of nano/micro-devices;
  • Electro-mechanical packaging of nano/micro-devices and their nano/micro-assembly.

Prof. Dr. Mustafa Yavuz
Guest Editor

MDPI Sensors

Materials for Nano- and Micro-Electro-Mechanical-Systems"