MEMS and NEMS Sensors: 2nd Edition
A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Physical Sensors".
Deadline for manuscript submissions: 25 November 2024
Dear colleagues,
The manufacturing and integration of autonomous and embedded sensors through a combination of micro- and nano-system technologies have revolutionized self-powered, high-bandwidth devices for advanced manufacturing (AM), artificial intelligence (AI), Internet of Things (IoT), and health technologies.
More specifically, nano- and micro-electro-mechanical-systems (N/MEMS) sensors are the building blocks for a vast range of applications, from continuous real-time health (wearable) and environmental monitoring (gas, biomolecules, pressure, temperature, etc.) to enabling embedded mobile internet services (wireless), including smart/connected cars and unattended vehicles (UAVs) (inertial). As these devices are present in the tens of billions, the potential for disruptive innovation has been immense.
The integration of nano- and micro-sensors, which are functionalized using emerging materials to complementary metal-oxide semiconductors (CMOSs) and microfluidics systems, and their electro-mechanical packing, represents a challenge. This is because the integration and packing require the deposition of multiple layers of different dielectrics and metals, and the atomic mismatch between these layers, acting as an electron trap, increases ohmic resistance and detection time, creates noise, and reduces sensitivity, selectivity, and responsivity.
This Special Issue aims to introduce the manufacturing, packaging, and integration of autonomous and embedded sensors through a combination of micro- and nano-systems. Topics in general include, but are not limited to, the following:
- Autonomous and embedded sensors: design, manufacture, packaging, and reliability;
- Biosensors (photonic, electrical, chemical) and their integration into MEMS, CMOS, and microfluidic systems for COVID-19 and other (future) pandemic proteins/metabolites/analytes;
- Sensor interconnectors/interfaces and their testing;
- Graphene-based nano-sensors;
- Electronic circuits for MEMS nano-sensor modulation;
- Nano-electro-mechanical sensors.
Prof. Dr. Mustafa Yavuz
Guest Editor