Welcome to Nano and Micro Systems Lab

They are mainly utilized for manufacturing and characterization of layered nanostructures such as oxide and metal thin films for nano and micro-electro-mechanical systems devices through Magnetron Sputtering and Atomic Force Microscopy (AMF). It is part of the NanoFab infrastructure of the Waterloo Institute for Nanotechnology (WIN).

Research interest

  • Nano and Micro-Electro-Mechanical Systems (N/MEMS) 
  • Micro- and nano-joining, packaging and reliability
  • Quantum electronic solids: superconductors, metamaterials and nanoscopic electronics based on graphene and nanotubes

Meet our people

Mustafa Yavuz
Professor/Director of Nano and Micro systems lab