Nano and Micro Systems Lab

Nano and Micro Systems Lab (NMSL) mission is to conduct various researches in advanced micro and nano mechanical systems sensing and actuation technologies driven by the potential impacts on society and the environment. The group objective is to address issues in overall NEMS and MEMS technologies advancement while contributing to fundamental sciences.

NMSL engaged in many areas of nanotechnology and microsystems, with a particular focus on devices and systems, experimentation and fabrication.

Research interest

  • Nano and Micro-Electro-Mechanical Systems (N/MEMS) 
  • Micro- and nano-joining, packaging and reliability
  • Quantum electronic solids: superconductors, metamaterials and nanoscopic electronics based on graphene and nanotubes

Meet our people

Mustafa Yavuz
Professor/Director of Nano and Micro systems lab