Nano and Micro Systems Lab

The Nano and Micro Systems Lab (NMSL) mission is to conduct various researches in advanced micro and nanomechanical systems sensing and actuation technologies driven by the potential impacts on society and the environment. The group objective is to address issues in overall NEMS and MEMS technologies advancement while contributing to fundamental sciences.

NMSL engaged in many areas of nanotechnology and microsystems, with a particular focus on devices and systems, experimentation, and fabrication. 

Ongoing Research Projects

COVID-19 BiosensorsResearchers from this project in the lab.

Researchers at the University of Waterloo are developing a COVID-19 biosensor. They are using an electronic device utilizing a graphene-based thin-film covalently functionalized with antibodies for the detection of a synthetic COVID-19 SPIKE protein. If successful, this device would be able to detect COVID-19 within minutes at low concentrations.

ManTech - Guelph Water Quality Sensing Partnership

Our team is excited to be working on new water sensor technologies in partnership with ManTech Inc from Guelph! We will be improving existing technologies and developing new materials for the photo-electrochemical oxidation of organics. This Photo-electrochemical Oxygen detector (PeCOD) technology will utilize thin-films, UV-excitation, and develop metamaterial solutions to improve the performance and accessibility of this critical aspect of water quality assessment. 

Nano-FET Resonator Projectnano-fet resonatoe

We aim to build the world’s most sensitive and versatile sensor in practical conditions, i.e. atmospheric pressure and ambient temperature. A novel dual-sensing approach is proposed by collecting information from both mechanical and electrical domains. In the electrical domain, information will be collected with charges from the Nanostructure Field Effect Transistor (nano-FET) property and in the mechanical domain with masses from the NEMS based Resonator property of the device.

Research Interests

  • Self-powered nano and MEMS sensors and sensor nodes
  • Electronic packaging and interconnectors; N/MEMS on PCBs; and Nano-/micro-joining
  • Quantum electronic solids: superconductors, graphene/graphene-like materials and 2D-TDMs

Meet our people

Mustafa Yavuz

Professor Mustafa Yavuz

Professor/Director of Nano and Micro Systems Lab