Micro fabrication and packaging

  • Packaging and reliability of MEMS: thick-wire bonding for power electronics
  • Elasto-optical properties of Al-films for micro-mirrors
  • Residual stress analysis of MEMS through photonics
  • Fabrication, packaging, testing and system feedback of MEMS frequency modulated gyroscopes
  • MEMS energy harvesters and their power unit design
  • Quality factor measurement of MEMS Gyroscope using Non-Destructive Testing (NDT)
  • Binary MEMS Sensors