We aim to build the world’s most sensitive and versatile sensor in practical conditions, i.e. atmospheric pressure and ambient temperature.
A novel dual-sensing approach is proposed by collecting information from both mechanical and electrical domains. In the electrical domain, information will be collected with charges from the Nanostructure Field Effect Transistor (nano-FET) property and in the mechanical domain with masses from the NEMS based Resonator property of the device.
![FET](/nano-micro-systems-lab/sites/default/files/uploads/images/screen_shot_2021-06-29_at_6.05.34_pm_0.png)