Professor/Director of Nano and Micro Systems Lab

Mustafa YavuzContact information

Phone: (519) 888 4567 ext.32093

Professional interests

  • Nano- and Micro-Electro-Mechanical-Systems (N/MEMS) Engineering

  • Micro- and nano-joining, packaging and reliability

  • Quantum electronic solids: superconductors, metamaterials and nanoscopic electronics based on graphene and nanotubes


  • Ph.D. Materials Engineering, School of Mechanical, Materials & Mechatronic Engineering, University of Wollongong, Wollongong, NSW, Australia, 1996

  • Ph.D. Applied Physics, Institute for Superconducting and Electronic Materials (ISEM), University of Wollongong, Wollongong, NSW, Australia, 1995

  • M.Sc. Materials Engineering, Middle East Technical University (METU), Ankara, Turkey, 1991

  • B.Sc. Materials Engineering, Middle East Technical University, Ankara, Turkey, 1989

Ph.D. Supervisors:

  • Prof. S.X. Dou, University of Wollongong, NSW-Australia

  • Prof. H. Maeda, Tohoku University, Sendai-Japan (invented BSCCO superconductors, 1988), Professor Emeritus

  • Dr. Lou Vance, Australian Nuclear Science and Technology Organization (ANSTO), Lucas Heights, NSW-Australia

Professional Experience

University of Waterloo, Waterloo, Ontario, Canada

  • Professor, 2009-present

  • Associate Professor, 2004 -2009

  • Department of Mechanical & Mechatronics Engineering

  • Department of System Design Engineering (Cross Appointed)

  • Department of Electrical & Computer Engineering (Cross Appointed)

Texas A&M University, College Station, Texas, USA

  • Adjunct Professor, Department of Mechanical Engineering, 2004-present

  • TEES Associate Professor, Department of Mechanical Engineering, 2003 - 2004

  • TEES Assistant Professor, Department of Mechanical Engineering, 2000 - 2003

  • Assistant Professor, Department of Physics, 1999-2000         

     *TEES: Texas Engineering Experimentation Station

Yamagata University, Yonezawa, Yamagata-ken, Japan (山形大学工学部・大学院理工学研究科)

  • Adjunct Professor, 2006-present

Accelerator Technology Corp, Bryan, Texas, USA

  • Principal Engineer, 1998-1999

Tohoku University, Institute of Materials, Sendai, Japan (東北大学金材料研究所)

  • Assistant Professor, Institute for Materials Research (Kinken), 1997-1998


  • Deputy Editor-in-Chief and Editor, Journal of Engineering Science and Technology (JESTECH), Elsevier, 2013-
  • Section Editor, Electronic Materials (MDPI, IF = 2.972), 2019-2021
  • Guest Editor, Materials (MDPI, IF=3.532), Special Issue “Functionalization of FET-nano/micro-sensors with Emerging Materials”, 2019-2021
  • Guest Editor, Materials Research Express (IoP Science): Focus on Semi-conducting Nanomaterials for Health, Environment and Security Applications, 2018-2019
  • Guest Editor, Sensors (MDPI, IF=3.302), Special Issue “Nano and MEMS Sensors”, 2018-2019
  • Guest Editor, Materials (MDPI), Special Issue: “Materials for Nano/Microelectronic Packaging Applications", 2018 Guest Editor, Sensors (MDPI), Special Issue “MEMS and Nano-sensors”, 2017
  • Associate Editor, IEEE International Conference on Advanced Intelligent Mechatronics, AIM 2017 
  • Guest Editor, Micromachines (MDPI, IF=2.48), Special Issue “MEMS Packaging and Reliability”, 2015

Scientific board membership and conference chair

  • Session Chair, High Field Science, Celebratory Waterloo-Rochester Photonics Symposium, in honor of Donna Strickland, Nobel laureate, the University of Waterloo, July 26, 2019
  • Technical Program Com, Semi-conducting Nanomaterials for Health, Environment and Security Applications Workshop, Grenoble, France, 2018
  • International Advisory Committee, 4th  International Conference on Nanojoining and Microjoining, Nara, Japan, 2018 Program Com. Member, 3rd International Conference on Pervasive and Embedded Computing, Porto, Portugal, 2018 International Workshop, Scientific Committee Member, Semi-Conducting Nanomaterials: Applications to Health, Environment and Security, Grenoble, France, 2018
  • Technical Program Com, 9th  International Conference on Sensor Device Technologies and Applications, Italy, 2018 Technical Program Com, 8th International Conference on Sensor Device Technologies and Applications, Italy, 2017
  • Conference Chair, 3rd Nanojoining and Microjoining, Niagara Fall, Canada, 2016,
  • Member International Advisory Committees, 14th International Symposium on Microelectronic and Packaging (ISMP), Seoul, Korea, 2015

Professional Registration

  • Professional Engineer, PE, Texas, US, January 1998

  • Professional Engineer, PE, Sendai-Aoba, Japan, September 1997

  • Chartered Engineer, CEng, NSW, Australia, June 1992

  • Professional Engineer, PE, Turkey, September 1989

Honors and Awards

  • Japanese Society for the Promotion and Science (JSPS) Fellowship, 2007

  • US Pi-Tau-Sigma, National Mechanical Engineering Teaching Award, US, 2003

  • Honorary Fellow, ISEM, University of Wollongong, New South Wales-Australia, 1999

  • British Council Partnerships for Excellence Post-doc International Award, UK, 1997

  • Australian Postgraduate Award, Australian Institute of Nuclear Science & Engineering (AINSE), Australia, 1994-96

  • Wollongong University Postgraduate Award for Research, Australia, 1994-96

  • NATO Award, Italy, 1990

  • NATO Award, Hungary, 1989

Research contributions and practical applications

Dr. Yavuz is the editors for, HSOA Journal of Nanotechnology: Nanomedicine & Nanobiotechnology”, Journal of Nanoscience & Technology (Symbiosis), Scholarena Journal of Nanoscience and Nanotechnology (SAJNN), OMMEGA Journal of Nanotechnology and Materials Science, and deputy editor-in-chief for Journal of Engineering Science and Technology (JESTECH), Elsevier since 2013.

Dr. Yavuz’s research area is micro and nanoscale materials design, fabrication and characterization, in 4 (four) key applications areas: a. Design, fabrication and characterization of high temperature (high-TC) superconducting composites for superconducting magnets and MR tomography; b. Design, fabrication and characterization of high-TC superconductors for Superconducting Quantum Interference Devices (SQUID) for bio-sensing/marking, and Qubits (Quantum Bits) for quantum information storage; c. Design, fabrication and characterization of nano-building-blocks for nano- and micro-electro-mechanical systems (N/MEMS) for photonic applications used in ultrafast electronics and biosensing, and d. Packaging (nanoand micro-bonding), integration and reliability of N/MEMS devices and interconnects.

Dr. Yavuz received the British Council Partnerships for Excellence Postdoctoral Bursary International Award in 1997 for his work on high-TC superconductors. He received the Japanese Society for the Promotion and Science (JSPS) Fellowship in 2006, 2007 and 2008; and was awarded US Pi-Tau-Sigma, National Mechanical Engineering Honor Society Award in 2003. He was one of the founding members of the Texas A&M University Interdisciplinary Graduate Materials Science and Engineering Program established in 2003, and Nanotechnology Collaborative Graduate Program at the University of Waterloo. Mustafa Yavuz, University of Waterloo, Ontario, Canada, 2015. 

He is currently the director of the Nano/Micro-Systems Research Lab supported by Canada Funding for innovation (CFI) since 1995.

He is cited as one of the most prominent nano-researchers in Canada by the Ontario Provincial Government, and was invited in 2007 and 2009 by the Canadian Ambassador for Japan as one of the Canadian Delegation to promote Canadian nanotechnology research in Tokyo, Japan

Most Significant Contributions to Research and/or to Practical Applications        

  • Developed a production tool that can be used to create templates for nano-electronics. This has been enabling the fabrication of radically new devices and materials such as quantum computers. He has developed the idea that vortices (nanoscale non-superconducting domains in a superconducting matrix) in these templates can be engineered to make for self-assembly manufacture of magnetic particles into new nano-structured materials and nano-scale electronic devices such as bio-SQUIDs and Qubits (US Patent, M. Yavuz et al, “Method and System for Storing Information Using Nano-Pinned Dipole Magnetic Vortices in Superconducting Materials,  

  • Pioneered developing smart magnetic thin films for the levitation of N/MEMS (flying MEMS). His contribution in this research is in developing design and fabrication of magnetic thin films and MEMS gripper materials using ferromagnetic thin films for the magnetic levitation (US Patent Application, MEMS Magnetic Levitation, Application No: 60/847934, Sept 29, 2006.

  • Developed graphene based NEMS devices interconnection packaging, metrology and integrating them into MEMS and conventional CMOS systems.( 

Courses taught

University of Waterloo

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