1. Nanofabrication technologies: e-beam lithography, X-ray lithography, dry etching, cryogenic Si etching, deep RIE, electrochemical deposition.
2. Nanodevices: process integration, metalens, augmented reality gratings, X-ray gratings and waveguide sensors.
3. Characterization in nanofabrication: SEM, AFM, TEM, XRD, XPS, XRD, etc.
 | brief_introduction_to_several_devices_2023y.pdf | 813 KB |
