Probe station

  • Cascade microtech probe station
  • Vibration Isolation Table

Custom equipment

  • Agilent digital storage oscilloscope
  • Agilent function/arbitrary waveform generator
  • Agilent mixed signal oscilloscope
  • Agilent triple output direct current (DC) power supply
  • Phonic power amplifier
  • Physik instrumente power amplifier

Dynamic​ micro-electromechanical systems (MEMS) characterization station

  • Agilent EMC analyzer
  • Agilent function/arbitrary waveform generator
  • Agilent mixed signal oscilloscope
  • Agilent signal generator
  • Polytec laser doppler vibrometer
  • Optical illuminator
  • Vibrometer controller

Static MEMS characterization station

Capacitive, thermal loading (Room Temperature to 250 °C), pull-in

  • Agilent mixed signal oscilloscope
  • Agilent precision LCR meter
  • Agilent signal generator
  • Keithley current source meter
  • Optical illuminator

    Laminar flow station

    • Branson model 1510 ultrasonic cleaner
    • Canadian cabinets laminar flow work station
    • Electro-metrics shielding effective text fixture
    • VWR analog vortex mixer

    Biomicro-electromechanical systems (BioMEMS) station

    • Agilent triple output DC power supply
    • Custom PDMS flow cell
    • Harvard apparatus pico plus syringe pump
    • NovaScan PSDP-4UVT UV-ozone Cceaner
    • Ocean optics USB 4000 UV-VIS miniature spectrometer
    • Ocean optics LS-1 tungsten halogen light source

    Miscellaneous

    • SmartDesiccator