Probe station
- Cascade microtech probe station
- Vibration Isolation Table
Custom equipment
- Agilent digital storage oscilloscope
- Agilent function/arbitrary waveform generator
- Agilent mixed signal oscilloscope
- Agilent triple output direct current (DC) power supply
- Phonic power amplifier
- Physik instrumente power amplifier
Dynamic micro-electromechanical systems (MEMS) characterization station
- Agilent EMC analyzer
- Agilent function/arbitrary waveform generator
- Agilent mixed signal oscilloscope
- Agilent signal generator
- Polytec laser doppler vibrometer
- Optical illuminator
- Vibrometer controller
Static MEMS characterization station
Capacitive, thermal loading (Room Temperature to 250 °C), pull-in
- Agilent mixed signal oscilloscope
- Agilent precision LCR meter
- Agilent signal generator
- Keithley current source meter
- Optical illuminator
Laminar flow station
- Branson model 1510 ultrasonic cleaner
- Canadian cabinets laminar flow work station
- Electro-metrics shielding effective text fixture
- VWR analog vortex mixer
Biomicro-electromechanical systems (BioMEMS) station
- Agilent triple output DC power supply
- Custom PDMS flow cell
- Harvard apparatus pico plus syringe pump
- NovaScan PSDP-4UVT UV-ozone Cceaner
- Ocean optics USB 4000 UV-VIS miniature spectrometer
- Ocean optics LS-1 tungsten halogen light source
Miscellaneous
- SmartDesiccator