MEMS = Micro-electromechanical systems
MOEMS = Micro-(opto)-electromechanical systems
ASME = American Society of Mechanical Engineers
SPIE = The Society of Photographic Instrumentation Engineers
IEEE = The Institute of Electrical and Electronics Engineers
PECVD = Plasma-enhanced chemical vapor deposition
Refereed journal publications
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Hassanpour P.A., Nieva P.M., and Khajepour A., "Stochastic analysis of a novel force sensor based on bifurcation of a micro-structure," J. Sound and Vibration, Vol. 330, No. 23, pp. 5753-5768, November 2011.
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Dyck N.C., Denomme R.C., and Nieva P.M.,"Effective medium properties of arbitrary Nnnoparticle shapes in a localized Surface plasmon resonance sensing layer," J. Phys. Chem. C, Vol. 115, No. 31, pp. 15225-15233, June 2011
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Hassanpour P.A., Nieva P.M., and Khajepour A.,"A passive mechanism for thermal stress regulation in micro-machined beam-type structures, modeling and experiment," Submitted to the J. Microsystem Technology, June 2011.
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Hassanpour P.A., Nieva P.M., and Khajepour A., "Electrostatic fringe effect in systems with three charged parallel micro-beams," Submitted to the Journal of Applied Mathematical Modelling, March 2011.
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Shavezipur M., Hashemi S., Nieva P.M., and Khajepour A., "Development of a triangular-plate mems tunable capacitor with linear capacitance-voltage response," Microelectronics Engineering Journal, Vol. 87, pp. 1721-1727, November 2010.
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Shavezipur M., Nieva P.M., Khajepour A., and Hashemi S.M., "Development of parallel-plate-based MEMS tunable capacitors with linearized capacitance-voltage response and extended tuning rang," J. Micromech. Microeng., Vol. 20, doi: 10.1088/0960-1317/20/2/025009, February 2010.
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Topaloglu N., Nieva P.M., Yavuz M., and Huissoon J.,"Modeling of thermal conductance in uncooled microbolometer pixel sensors," Sens. and Act.: A Phys., Vol.157, No. 2, pp. 235-245, 2010."
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Zwart A., Derige G., Effa D., Nieva P.M., and Lancaster S., "A novel virtual button user interface for determining the characteristics of an impulse input based on mems inertial sensors," Sensors & Transducers J., Special Issue, 7, pp. 179-190, October 2009.
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Shavezipur M., Nieva P.M, Hashemi S., and Khajepour A.,"A parallel-plate-based fishbone-shape MEMS tunable capacitor with linear capacitance-voltage response," Sensors & Transducers J., Special Issue, 7, pp. 15-24, October 2009.
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Nieva P.M., Kuo J., Chiang S., and Syed A., "A novel MOEMS pressure sensor: modeling and experimental evaluation," Journal Sadhana, Springer India, Vol. 34 No. 4, pp.615-623, August 2009.
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Shavezipur M., Nieva P.M., Hashemi S., and Khajepour A., "A parallel-plate-based fishbone-shape MEMS tunable capacitor with linear capacitance-voltage response," Sensors & Transducers Journal, Special Issue, October 2009, Vol. 7, pp. 15-24, 2009.
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Elbuken C., Topaloglu N., Nieva P.M., Yavuz M., and Huissoon J., "Modeling and analysis of a 2-DOF bidirectional electro-thermal microactuator," J. Microsyst. Tech., Vol. 15, pp. 713-722, 2009
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Nieva P.M., McGruer N., Adams G., and DiMarzio C., "A fabry-perot interferometric system for the experimental verification of the air viscous damping in MEMS," Int. J. Micro and Nano Systems, Accepted October 2008.
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Shavezipur M., Hashemi S.M., Nieva P.M., and Khajepour A., "Development of a triangular-plate MEMS tunable capacitor with linear capacitance-voltage response," Microelectronics Journal, 2008.
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Nieva P.M., Kuo J., Chiang S.W., and Syed A., "A novel MOEMS pressure sensor: modeling and experimental evaluation," Journal Sadhana, Indian Academy of Science, Accepted September 15, 2007.
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Nieva P.M., New trends on MEMS sensor technology for harsh environment applications," Sensors & Transducers Journal, Special Issue, pp.10-20, October 2007.
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Nieva P.M., McGruer N., Adams G., and DiMarzio C., "Experimental verification of the air viscous damping in MEMS using a fabry-perot interferometric technique," Applied Optics, OSA, 2007.
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Topaloglu N., Nieva P.M., Yavuz M., and Huissoon J., "Composite region thermal modeling of uncooled microbolometer pixel," Submitted to Journal of Physics D: Applied Physics, IoP, 2007.
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Nieva P.M., McGruer N., and Adams G., "Design and characterization of a micromachined fabry-perot vibration sensor for high temperature applications," J. Micromech. Microeng., Vol. 16, pp. 2618-2631.
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Tada H., Kumpel A., Lathrop R.E., Nieva P.M., Zavracky P., Miaoulis I., and Wong P., "Thermal expansion coefficient of polycrystalline silicon and silicon dioxide thin films at high temperatures," J. Appl. Phys., Vol. 87, No. 9, pp. 4189-4193, 2000.
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Tada H., Kumpel A., Lathrop R., Slanina J., Nieva P.M., Zavracky P., Miaoulis I., and Wong P., "Novel imaging system for measuring microscale curvatures at high temperatures," Rev. Sci. Instrum., Vol. 71, No. 1, pp. 161, 2000.
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Abramson A., Nieva P.M., Tada H., Zavracky P., Miaoulis I. and Wong P., "Effect of doping level during rapid thermal processing of multilayer structures," J. Mater. Res., Vol. 14, No.6, pp. 2402-2410, 1999.
Full papers in refereed conference proceedings
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Asiaei, S., Denomme, R., Marr, C., Nieva, P., Vijayan, M., "Fast self-assembly kinetics of alkanethiols on gold nano-particles, simulation and characterization by location surface plasmon resonance spectroscopy," Microfluidics, BioMEMS, and Medical Microsystems, SPIE MEMS-MOEMS, January 2012.
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P. Nieva, J. Godin, R. Norris, A. Sohi, T. Leung, "Effects of dry plasma releasing process parameters and induced in-plane stress on MEMS devices yield", SPIE Photonics West 2012 MEMS-MOEMS, January 2012.
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Denomme, R., Young, Z., Brock, L., Nieva, P. M., Vijayan M., "Optimization of a localized surface plasmon resonance biosensor for heat shock protein 70," SPIE Photonics West: OPTO, vol. 8269, San Francisco, January 2012
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Hassanpour P.A., Nieva P.M., and Khajepour A., "Dynamic analysis of three parallel beams with electrostatic force interaction," Accepted for publication in the Proceedings of the ASME 2011 International Mechanical Engineering Congress and Exposition, IMECE 2011, Denver, CO, USA, November 11-17, 2011.
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Asiaei S., Nieva P.M., "Self-assembled monolayers' fast kinetics of adsorption on gold, modeling and experiment in a heterogeneous immunoassay," Accepted to IEEE Sensors 2011, Limerick, Ireland, October 28-31, 2011.
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Hassanpour P.A., Nieva P.M., and Khajepour A., "Thermally-robust asymmetric resonators for energy harvesting applications," Accepted for publication in the Proceedings of the International Conference on Applied Mathematics, Modeling and Computational Science - AMMCS-2011, Waterloo, ON, Canada, July 25 - 29, 2011.
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Godin J.R., Won S.P., Nieva P.M., Phong L.N., and Pope T., "Residual stress dependency on wafer location of thin film PECVD silicon nitride," Boston: TechConnect World, June 2011.
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Norris R., Hamel J., and Nieva P.M., "Silicon integrated phononic bandgap crystal platform for sensors and signal processing elements: theory and experiment," Proceedings of the 24 IEEE International Conference on Micro-Electro-Mechanical-Systems, Cancun, Mexico, January 2011.
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Denomme R., Iyer K., Kreder M., Smith B., and Nieva P.M., "Fabrication of large-area metal nanoparticle arrays by nanosphere lithography for localized surface plasmon resonance biosensors," SPIE Photonics West MOEMS-MEMS, San Francisco, vol. 7927, January 2011.
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Sohi A., Shavezipur M., Nieva P., and Khajepour A., "A structurally multifunctional pressure-temperature sensor," Proc. 2nd. Microsyst. & Nanoelect. Research Conf. (MNRC 2009), Ottawa, ON, Canada, Oct. 13-14, 2009.
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Effa D., Nieva P.M., Zwart A., Lancaster-Larocque S., “Design and modeling of a MEMS accelerometer for a novel virtual button user interface,” Proc. IEEE, Advances in Systems and Sensors: Sensors and Applications, 42:10, pp. 597-602.
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Bassiachvili E., Nieva P.M. and Khajepour A., “On-chip Young's modulus characterization of heavily doped thin film Poly-Si at different temperature conditions,” Proc. IMECE 2009, FL, USA, IMECE 2009-13083, Nov. 13-19, 2009.
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Sohi A., Shavezipur M., Nieva P.M., and Khajepour A., “Modeling of a multifunctional pressure-temperature sensor,” Proc. IMECE 2009, FL, USA, IMECE 2009-12930, Nov. 13-19, 2009.
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Shavezipur M., Wong C., Nieva P.M., and Khajepour A., “Design and modeling of a MEMS capacitive temperature sensor with linear capacitance-temperature response,” Proc. IMECE 2009, FL, USA, IMECE 2009-12790, Nov. 13-19, 2009.
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Hassanpour P., Nieva P.M., and Khajepour A., “A novel bi-stable force sensor: theory and modeling,” Proc. IMECE 2009, FL, USA, IMECE 2009-12673, Nov. 13-19, 2009.
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Hassanpour P., Wong C., Nieva P.M., and Khajepour A., “Axial force regulation in MEMS resonant sensors,” Proc. IMECE 2009, FL, USA, IMECE 2009-12676, Nov. 13-19, 2009.
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Zwart A., Effa D., Nieva P.M., and Lancaster-Larocque S., “A novel virtual button user interface for determining the characteristics of an impulse input based on MEMS inertial sensors,” Nanotech Conference and Expo, Houston, TX, May 3-7, 2009, pp. 492-498.
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Shavezipur M., Nieva P.M., Khajepour A., and Hashemi S., “Effect of nonlinear structural stiffness on the response of capacitive MEMS devices”, Nanotech Conference and Expo, Houston, TX, May 3-7, 2009, pp. 1-4.
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Shavezipur M., Nieva, P.M., Khajepour A., and Hashemi S.M., “A parallel-plate-based fishbone-shape MEMS tunable capacitor with linear capacitance-voltage response”, Nanotech Conference and Expo, Houston, TX, May 3-7, 2009, pp. 1-4.
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Shavezipur M., Hashemi S., Khajepour A., and Nieva P.M., “A Linearly tunable MEMS capacitor with segmented electrode and enhanced structure,” Proc. IMECE 2008, ASME, Boston, MA, USA, IMECE 2008-68081, Oct. 31-Nov. 6.
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Shavezipur M., Hashemi S., Khajepour A., and Nieva P.M., “Development of a linearly tunable modified butterfly-shape MEMS capacitor,” Proc. IMECE 2008, ASME, Boston, MA, USA, IMECE 2008-68090, Oct. 31-Nov. 6.
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Norris R., Hamel J., and Nieva P.M., “Modeling of MEMS high-order mode inter-digital waveform synthesizer for flexural plate array sensors,” Proc. 7th IEEE Conf. Sensors, Lecce, Italy, Oct. 26-29, pp. 502-505.
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Norris R., Nieva P.M., and Hamel J., “Analytical analysis of a discrete MEMS diatomic mass-spring phononic band gap crystal for vibration stabilization applications,” Proc. 7th IEEE Conference on Sensors, Lecce, Italy, Oct. 26-29 2008, pp. 506-509.
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Bassiachvili E., Stewart R., Shavezipur M., and Nieva P.M., “A MEMS capacitive, passively powered heart rate monitor: design and analysis,” Proc. 1st Microsyst. & Nanoelect. Research Conf. (MNRC 2008), Ottawa, ON, Canada, Oct. 15, pp 81-84.
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Syed A., Mu L., Shavezipur M., and Nieva P.M., “Eliminating the galvanic effect for microdevices fabricated with PolyMUMPs®,” Proc. 1st Microsyst. & Nanoelect. Research Conf. (MNRC 2008), Ottawa, ON, Canada, Oct. 15, pp. 197-200.
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Topaloglu N., Nieva P.M., Yavuz M., and Huissoon J., ”A pixel-by-pixel thermal conductance tuning mechanism for uncooled microbolometers,” Proc. 1st Microsyst. & Nanoelect. Research Conf. (MNRC 2008), Ottawa, ON, Canada, Oct. 15, pp. 201-204.
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Topaloglu N., Elbuken C., Nieva P.M., Yavuz M., and Huissoon J., “Modeling and simulation of a 2-DOF bidirectional electrothermal microactuator,” Proc. SPIE, Smart Struct. & Mat. 2008, San Diego, CA, USA, Vol. 6926, 692605.
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Topaloglu N., Nieva P.M., Yavuz M., and Huissoon J., “Thermal modeling of thermally isolated microplates,” Proc. SPIE Smart Struct. & Mat. 2008, San Diego, CA, USA, Vol. 6926.
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Topaloglu N., Nieva P.M., Yavuz M., and Huissoon J., “Thermal Conductance Estimation for Uncooled Microbolometer Pixels,” Proc. Can. Cong. Appl. Mech., Toronto, pp. 740-741.
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Topaloglu N., Nieva P.M., Yavuz M., and Huissoon J., “A novel method for estimating the thermal conductance of uncooled microbolometer pixels,” Proc. ISIE 2007 - IEEE Int. Symp. Ind. Elect., Vigo, Spain, June 2007.
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Haghighat S., Nieva P.M., and Khajepour A., “Analytical study of squeeze film damping in micro cantilever beams,” Proc. Can. Cong. Appl. Mech., Toronto, pp. 452-453.
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Nieva P.M., Adams G., McGruer N., “Design and modeling of a multifunctional MEMS fabry-perot sensor for the simultaneous measurement of displacement, pressure and temperature,” Proc. SPIE, Smart Struct. & Mat. 2007, San Diego CA, USA, 6529, p. 77.
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Nieva P.M., McGruer N. and Adams G., “A multipurpose optical MEMS sensor for harsh environments,” Tech. Proc. 2006 NSTI Nanotech. Conf., Boston, MA, 3, pp.419-422.
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Nieva P.M, McGruer N., and Adams G., “Air viscous damping effects in vibrating microbeams,” Proc. SPIE, Smart Struct. & Mat. 2006, San Diego, CA, USA, 6169, p. 23.
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Nieva P.M., McGruer N., and Adams G., “MEMS-based fabry-perot vibration sensor for harsh environments”, Proc. SPIE, Smart Struct. & Mat. 2006, San Diego, CA, USA, 6174, p. 75.
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Bargmann M., Kumpel A., Tada H., Nieva P.M., Zavracky P., Miaoulis I., and Wong P., "Temperature-dependent coefficient of thermal expansion of silicon nitride films used in microelectromechanical systems," Mat. Res. Soc. Symp. Proc. Vol. 605, pp. 235-240, 2000.
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Nieva P.M., Zavracky P., Adams G., Tada H., Abramson A., Miaoulis I., Wong P., "Temperature measurement during rapid thermal annealing using MEMS," Proc. 5th ASME/JSME Joint Thermal Eng. Conf., San Diego, CA, March 15-19, 1999.
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Tada H., Nieva P.M., Zavracky P., Miaoulis I., and Wong P., "Determining the high temperature properties of thin films using bilayered cantilevers," Mat. Res. Soc. Proc. Vol. 546, pp. 39-44, 1999.
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Nieva P.M., Tada H., Zavracky P., Adams G., Miaoulis I., and Wong P., "Mechanical and thermophysical properties of silicon nitride thin films at high temperatures using in-situ MEMS temperature sensors," Mat. Res. Soc. Proc. Vol. 546, pp. 97-102, 1999.
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Tada H., Abramson A., Nieva P.M., Zavracky P., Miaoulis I., and Wong P., "Effects of surface patterning in thin film structures on the thermal radiative properties during rapid thermal processing," Proc. ASME IMECE 98, HTD-Vol.361-2, pp. 93-98, 1998.
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Tada H., Abramson A., Nieva P.M., Zavracky P., Miaoulis I., and Wong P., "MEMS as temperature sensors during high temperature processing," Mat. Res. Soc. Symp. Proc. Vol. 518, pp. 161-166, 1998.
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Nieva P.M., "Prices and costs of electricity in peru: typical cases" Symp. Electrical Energy, Peru 1996.
Keynote speeches
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Nieva P.M., "MEMS sensors for harsh environments," Keynote speech at the 2007 Nano Science and Technology Institute (NSTI) Nanotechnology Conf. and Trade Show, Santa Clara, CA, USA, May 2007.
Invited talks
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Nieva P.M., "Laser interferometry for harsh environment MEMS," 2008 March Meeting of the American Physical Society, March 13, 2008, New Orleans, USA
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Nieva P.M., "MEMS sensors for harsh environment applications," Int. Elect. Pack. Symp., National Trends in Small Scale Syst.& Microelect. Packaging, July 31, 2007, NY, USA
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Nieva P.M., "A novel MOEMS pressure sensor: modeling and experimental evaluation," 10th Int. Conf. Adv. Mat., IUMRS-International Conference on advanced Materials (ICAM) 2007, October 8-13, 2007, Bangalore, India.
Poster presentations (abstract refereed), application notes and others
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Godin J.R., Won S.P., Nieva P.M., Phong L.N., and Pope T., "Residual stress dependency on wafer location of thin film Plasma-enhanced chemical vapor deposition (PECVD) silicon nitride," Boston: TechConnect World, June 2011.
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Iyer K., Denomme R., and Nieva P., "Using nanosphere lithography to fabricate nanoparticle arrays for plasmonic applications," CMC Microsystems Application Note, Online, March 2011, CMC-00200-01522
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Dyck N., Denomme R., and Nieva P.M., "Flow injection analysis system for use in spectroscopic characterization of photonic devices in a microfluidic environment," CMC Microsystems Application Note, Online, September 2010, CMC-00200-01363
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Denomme R., Asiaei S., Hassanpour P.A., Nieva P.M., Vijayan M., "Portable protein biosensor based on localized surface plasmon resonance (LSPR) of metallic nanoparticles and interference spectroscopy," Lab-on-a-chip (LOAC) World Congress, 6-7 August 2009, San Francisco, CA, USA, 1008-LOAC.
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Mu M., Syed A., Nieva P.M., "Using bent-bridges to eliminate the galvanic effect in the manufacture of MEMS devices fabricated in the MEMSCAP PolyMUMPs process,"; CMC Microsystems Application Note, MS-31-03.11.09-A, March 11, 2009.
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Bassiachvili E., Nieva P.M., Khajepour A., "On-chip young's modulus characterization of the effect of heavy phosphorus doping on polysilicon thin films", International Mechanical Engineering Conference and Exposition, 13-19 November 2009, FL, USA, IMECE 2009-13083.
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Nieva P.M., Bassiachvili E., Hassanpour P.A., Shavezipur M., Denomme R., Asiaei S., Norris R., Effa D., Hanitijo D.,"SimsLab at University of Waterloo", International Mechanical Engineering Conference and Exposition (IMECE), 13-19 November 2009, FL, USA, IMECE 2009.
Patents
- Nieva P.M., and Denomme R.C., "Method and apparatus for an interferometric localized surface plasmon resonance (ILSPR) sensor," US Patent Application No. 13/091,805, Filed on April 21, 2011. (Under Examination)