Jeremy Godin

PhD student

Contact

Jeremy Godin

Email: jrgodin@uwaterloo.ca

Phone: +1-519-888-4567 ext. 35073

Education

  • Candidate for PhD, University of Waterloo, Waterloo, Ontario, Canada
  • MASc, Mathematics Université de Sherbrooke, Sherbrooke, Quebec, Canada, 2009
  • BASc, Honours Physics, Bishops University, Sherbrooke, Quebec, Canada, 2006

Research interests

  • Reliability of micro-electromechanical systems (MEMS) devices

Publications

Refereed journal publications

  • Edery A., and Godin J., "Second order Kerr deflection," Gen. Rel. Grav. 38 (2006) 1715.

Full papers in refereed conference proceedings

MEMS = Micro-electromechanical systems 

MOEMS = Micro-(opto)-electromechanical systems 

ASME = American Society of Mechanical Engineers

SPIE = The Society of Photographic Instrumentation Engineers

PECVD = Plasma-enhanced chemical vapor deposition

  • P. Nieva, J. Godin, R. Norris, A. Sohi, T. Leung, "Effects of dry plasma releasing process parameters and induced in-plane stress on MEMS devices yield", SPIE Photonics West 2012 MEMS-MOEMS, January 2012.
  • Godin J., Won S.P., Nieva P.M., Phong L.N., and Pope T., "Residual stress dependency on wafer location of thin film pecvd silicon nitride." Boston: TechConnect World, 2011.
  • E. Bassiachvili, J. R. Godin, P. Nieva, and A. Khajepour, “On-chip structures for the determination of the dopant-dependent young’s modulus of heavily phosphorus doped polysilicon with stress compensation,” pp. 45–50, Jan. 2010.