Abramson, A. ., Nieva, P. ., Tada, H. ., Zavracky, P. ., Miaoulis, I. ., & Wong, P. . (1999). Effect of doping level during rapid thermal processing of multilayer structures. Journal of Materials Research, 14, 2402-2410.
Reference author: H Tada
First name
H
Last name
Tada
Tada, H. ., Nieva, P. ., Zavracky, P. ., Miaoulis, I. ., & Wong, P. . (1998). Determining the high-temperature properties of thin films using bilayered cantilevers. MRS Online Proceedings Library (OPL), 546.
Tada, H. ., Abramson, A. ., Nieva, P. ., Zavracky, P. ., Miaoulis, I. ., & Wong, P. . (1998). MEMS as Temperature Sensors During High Temperature Processing. MRS Online Proceedings Library Archive, 518.