Reference author: E Bassiachvili

First name

E

Last name

Bassiachvili

Bassiachvili, E., Nieva, P., & Khajepour, A. (2009). On-Chip Young s Modulus Characterization of the Effect of Phosphorus Heavy Doping on Polysilicon Thin Films ASME International Mechanical Engineering Congress and Exposition, 43857, 77-83.

Bassiachvili, E., , Nieva, P., & Khajepour, A. (2010). On-Chip Structures for the Determination of the Dopant-Dependent Young s Modulus of Heavily Phosphorus Doped Polysilicon With Stress Compensation ASME International Mechanical Engineering Congress and Exposition, 44472, 45-50.