Siva Sivoththaman

Fuel Cells

Dr. Sivoththaman is a Professor in the Department of Electrical and Computer Engineering, an Institute of Electrical and Electronic Engineers (IEEE) Student Branch Counselor, and Associate Chair, Graduate Studies, at the University of Waterloo. He also holds an Ontario Research Chair in Renewable Energy Technologies and Health and is Director of the Centre for Advanced Photovoltaic Devices and Systems at the University.
 

Research Expertise

  • Advanced processing technologies for microelectronic devices and process modeling
  • Low-permittivity dielectric films and device integration
  • Low-thermal budget, rapid thermal, and optothermal processing in silicon
  • Micro-electro-mechanical systems (MEMS) technology, silicon micromachining
  • Nanocrystalline semiconductors and nanostructures
  • Silicon-based crystalline and thin-film photovoltaic devices: design and fabrication technology

Department Profile

Centre for Advanced Photovoltaic Devices and Systems

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