Information for

Siva Sivoththaman

Professor and Director of the Nanotechnology Engineering Program

Contact information


Phone: 519-888-4567 x35319

Location: ERC 1001

Fax: 519-746-3077


  • BE, Madurai
  • MEng, Asian Institute of Technology, Bangkok
  • PhD, University of Paris, Paris

Research interests

  • Silicon-based crystalline and thin-film photovoltaic devices: design and fabrication technology
  • Advanced processing technologies for microelectronic devices and process modeling
  • Microelectromechanical systems (MEMS) technology, silicon micromachining
  • Nanocrystalline semiconductors and nanostructures
  • Low-permittivity dielectric films and device integration
  • Low-thermal budget, rapid thermal, and optothermal processing in silicon technology

Further information

Please see Professor Sivoththaman's own web page for more information.

University of Waterloo

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