Siva Sivoththaman

Professor, Ontario Research Chair

Contact information

Professor Siva SivoththamanEmail:

Phone: 519-888-4567 x35319

Location: ERC 1001

Fax: 519-746-3077


  • BE, Madurai
  • MEng, Asian Institute of Technology, Bangkok
  • PhD, University of Paris, Paris

Research interests

  • Silicon-based crystalline and thin-film photovoltaic devices: design and fabrication technology
  • Advanced processing technologies for microelectronic devices and process modeling
  • Microelectromechanical systems (MEMS) technology, silicon micromachining
  • Nanocrystalline semiconductors and nanostructures
  • Low-permittivity dielectric films and device integration
  • Low-thermal budget, rapid thermal, and optothermal processing in silicon technology

Selected references

  • L. Tian, E. Fathi, R.S. Tarighat and S. Sivoththaman, "Nanocrystalline Silicon Deposition at High rate and Low temperature from Pure Silane in a Modified ICP-CVD System", Semiconductor Science and Technology, vol.28, pp.105004 (1-5), 2013.
  • M. Moradi and S. Sivoththaman, "Strain Transfer Analysis of Surface-Bonded MEMS Strain Sensors", IEEE Sensors Journal, vol.13, No.2, pp. 637-643, 2013.
  • M. Gharghi, E. Fathi, B. Kante, S. Sivoththaman, and X. Zhang, "Heterojunction Silicon Microwire Solar Cells", Nano Letters, vol.12, pp. 6278−6282, 2012.
  • M. Gharghi and S. Sivoththaman, "Spherical Photovoltaic Device with Tailored Emitter Structure", IEEE Electron Device Letters, vol.32, pp.48-50, 2011.
  • B. Esfandiarpour and S. Sivoththaman, "A Silicon Texturing Technique Based on Etching Through a Liquid-Phase Deposited Oxide Mask", Electrochemical and Solid-State Letters, vol.13, pp.D97-D99, 2010.

Further information

Please see Professor Sivoththaman's own web page for more information.

University of Waterloo

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