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Robust multivariable estimation and control in an epitaxial thin film growth process under uncertainty

Citation:

Rasoulian, S. , & Ricardez-Sandoval, L. A. . (2015). Robust multivariable estimation and control in an epitaxial thin film growth process under uncertainty. Journal of Process Control, 34, 70–81. Elsevier.

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E6 3014

519-888-4567 , ext. 38667

laricardezsandoval@uwaterloo.ca

University of Waterloo

University of Waterloo

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Waterloo, ON, Canada N2L 3G1

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