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Reference author: Godin JR
First name
Godin
Suffix
JR
Bassiachvili, E. ., , Nieva, P. ., & Khajepour, A. . (2010). On-Chip Structures for the Determination of the Dopant-Dependent Young s Modulus of Heavily Phosphorus Doped Polysilicon With Stress Compensation. ASME International Mechanical Engineering Congress and Exposition, 44472, 45-50.