On-Chip Structures for the Determination of the Dopant-Dependent Young s Modulus of Heavily Phosphorus Doped Polysilicon With Stress Compensation
Title | On-Chip Structures for the Determination of the Dopant-Dependent Young s Modulus of Heavily Phosphorus Doped Polysilicon With Stress Compensation |
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Author | |
Year of Publication |
2010
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Conference Name |
ASME International Mechanical Engineering Congress and Exposition
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