Bassiachvili, E. ., Nieva, P. ., & Khajepour, A. . (2009). On-Chip Young s Modulus Characterization of the Effect of Phosphorus Heavy Doping on Polysilicon Thin Films. ASME International Mechanical Engineering Congress and Exposition, 43857, 77-83.
Reference author: E Bassiachvili
First name
E
Last name
Bassiachvili
Bassiachvili, E. ., , Nieva, P. ., & Khajepour, A. . (2010). On-Chip Structures for the Determination of the Dopant-Dependent Young s Modulus of Heavily Phosphorus Doped Polysilicon With Stress Compensation. ASME International Mechanical Engineering Congress and Exposition, 44472, 45-50.