On-Chip Young s Modulus Characterization of the Effect of Phosphorus Heavy Doping on Polysilicon Thin Films
| Title | On-Chip Young s Modulus Characterization of the Effect of Phosphorus Heavy Doping on Polysilicon Thin Films |
|---|---|
| Author | |
| Year of Publication |
2009
|
| Conference Name |
ASME International Mechanical Engineering Congress and Exposition
|
| Download citation |