Reference author: Jeremy Godin

First name

Jeremy

Middle name

R

Last name

Godin

Godin, J. R., Seong-hoon, W. ., Nieva, P. M., Phong, L. N., & Pope, T. . Residual Stress Dependency on Wafer Location of Thin Film PECVD Silicon Nitride. N/A.

Nieva, P. M., Godin, J. R., Norris, R. C., Sohi, A. N., & Leung, T. . (2012). Effects of dry plasma releasing process parameters and induced in-plane stress on MEMS devices yield. Reliability, Packaging, Testing, and Characterization of MEMS MOEMS and Nanodevices XI, 8250, 825003. International Society for Optics and Photonics.