Sohi, N. ., Nieva, P. ., & Khajepour, A. . (2013). A smaller footprint MEMS sensor for on-chip temperature measurement. Reliability, Packaging, Testing, and Characterization of MOEMS MEMS and Nanodevices XII, 8614, 86140B. International Society for Optics and Photonics.
Reference author: Najafi Sohi
Leading initial
A
First name
Najafi
Last name
Sohi
Sohi, N. ., Nieva, P. ., & Khajepour, A. . (2012). A new bimaterial microcantilever with tunable thermomechanical response. Microelectronic Engineering, 96, 18-23.